Semiconductor clean room high vacuum grease

SEIVIO Vaculub X189 Semiconductor Clean Room High Vacuum Grease is based on micro-filtered linear perfluoropolyether oil (PFPE) and is thickened by a special process using special polytetrafluoroethylene (PTFE) powder with an average particle size of <0.8 microns. This product optimizes the production process and reduces the risk of volatilization through baking and pre-extraction. It has low gas release rate and low dust generation characteristics. It perfectly solves the problems of grease volatilization and particle release under vacuum and high temperature. It is a grease for semiconductor equipment with excellent comprehensive performance.

• Low particle release, no large amount of powder will be shed during exercise;
• Class 100 cleanliness standard, less particle release, suitable for dust-free clean rooms;
• Perfluorooctanoic acid (PFOA)-free and compliant with environmental regulations;
• The colloid has good stability, less oil separation, and is not prone to oil migration;
• Wear-resistant, fretting-resistant and fretting-resistant (micro-vibration and gnawing-resistant).

It is suitable for use in special environments such as semiconductors, high temperatures, vacuum, and clean rooms, such as wafer processing robots and wafer manufacturing equipment for positioning and transferring wafers. These lubricants need to meet cleanliness requirements, resist corrosion in environments where corrosive process gases and chemicals are present, while maintaining stability in use with minimal dynamic particle generation.

1kg/can Order number 470318

Store in a dry place.