Semiconductor wafer inspection equipment grease

SEIVIOVaculub B042 Semiconductor wafer inspection equipment greaseYesMade of high-purity linear perfluoropolyether oil, nano-level ultra-finePTFE thickens. It is refined by adding special anti-corrosion additives. It is a special grease specially used in the clean room environment of wafer inspection machines (probe stations, optical inspection equipment, wafer manipulators, measurement equipment, etc.). The core goal is to reduce friction and anti-wear in precision moving parts, and at the same time, it must not volatilize or drop particles to contaminate wafers, optical lenses, and sensors.

• After deep removal of small molecules, the total mass loss TML and condensable volatile matter CVCM are low;
• Fully compatible with photoresist, special cleaning agents, and fluororubber seals used in the detection process, with no corrosion or swelling risk;
• Smooth operation for a long time, reducing friction, extending the life of the manipulator and reducing maintenance cycles;
• Low oil separation reduces base oil scattering, which can inhibit wafer contamination caused by base oil scattering;
• It has extremely high chemical stability and does not react with acids, alkalis and highly active substances.