Trifluoromethane resistant grease

SEIVIOVaculub B042 Trifluoromethane resistant grease YesMade of high-purity linear perfluoropolyether oil, nano-level ultra-finePTFE thickens. It is refined by adding special anti-corrosion additives. Specialty perfluoropolyether (PFPE) grease customized for extreme operating conditions when exposed to trifluoromethane (CHF₃, a fluorine-containing etching specialty gas commonly used in semiconductor manufacturing).

• Resistant to long-term contact with trifluoromethane and other fluorine-containing special gases, does not dissolve, decompose, or produce reactive impurities;
• The friction coefficient can be as low as 0.05, ensuring long-term low-wear operation of precision transmission components;
• Fully compatible with fluororubber, PTFE seals and most engineering plastics, without risk of swelling.

Suitable for semiconductor manufacturing, vacuum valves, O-ring seals, wafer transfer robot arm bearing lubrication seals in the trifluoromethane etching process, chemical corrosion conditions: extreme working conditions lubrication of reactor bearings, pump shafts, plug valves and other components that are exposed to trifluoromethane media.

1kg/can Order number 381995

Store in a dry place.